Location History:
- Kawasaki, JP (1996 - 2001)
- Tokyo, JP (2001 - 2004)
- Fukaya, JP (2006)
Company Filing History:
Years Active: 1996-2006
Title: **Innovator Toshiharu Nakashima: Advancements in Projection Optical Systems**
Introduction
Toshiharu Nakashima, an esteemed inventor from Fukaya, Japan, has made significant contributions to the field of optical engineering. With a total of eight patents to his name, he has become a key figure in the development of methods and technologies related to projection optical systems.
Latest Patents
Nakashima's latest patents encompass a variety of innovative methods, including the projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method, and exposure apparatus. His work focuses on measuring wavefront aberrations in projection optical systems and utilizing these measurements to improve the transfer of patterns onto wafers. By analyzing the line width differences of images of line patterns at different orientations, Nakashima’s methods allow for precise adjustments to the projection system, enhancing the accuracy of optical transfers.
Career Highlights
Nakashima's career has been primarily associated with Nikon Corporation, a leader in imaging and optical technologies. Throughout his tenure, he has continuously strived to advance the capabilities of optical systems, contributing to the development of high-precision manufacturing processes pivotal in semiconductor production.
Collaborations
Throughout his career, Nakashima has collaborated closely with other skilled professionals, including Masato Hamatani and Ken Ozawa. These partnerships have fostered a rich environment for innovation, allowing for the cross-pollination of ideas essential for tackling complex challenges in the field of optics.
Conclusion
Toshiharu Nakashima's work in the realm of projection optical systems demonstrates the critical intersection of innovation and technology. His patents not only reflect his ingenuity but also underline the importance of precision in the manufacturing processes of the future, making substantial contributions to the advancements in optical engineering.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.