Location History:
- Fuchu, JP (2004)
- Nirasaki, JP (2017)
- Yamanashi, JP (2017)
Company Filing History:
Years Active: 2004-2017
Title: The Innovations of Toru Yamauchi
Introduction
Toru Yamauchi is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, his work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
Yamauchi's latest patents include a support information display method, a maintenance support method for substrate processing apparatuses, and a substrate processing system. The support information display method involves acquiring a first image of a substrate processing apparatus using a camera in a head mount display. It estimates support information related to the apparatus and displays it visually for operators. His alignment apparatus for aligning wafers includes a mounting unit, imaging unit, elevation unit, and controlling unit. This apparatus is designed to ensure precise alignment by estimating the warpage state of the wafer and detecting alignment marks.
Career Highlights
Yamauchi has built a successful career at Tokyo Electron Limited, where he has been instrumental in developing innovative technologies. His work has significantly impacted the efficiency of substrate processing, making him a key figure in the industry.
Collaborations
Some of his notable coworkers include Toshiaki Kodama and Kiminori Okada, who have collaborated with him on various projects.
Conclusion
Toru Yamauchi's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his importance as an inventor. His innovative methods and systems continue to influence the industry positively.