Tokyo Electron Limited

Toru Yamauchi

Toshiaki Kodama

Hiroshi Nakamura

Sensho Kobayashi

Gaku Ikeda

Kazuya Uoyama

Kiminori Okada

Tadahito Nezu

A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.

Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium

An alignment apparatus for aligning a wafer includes a mounting unit, an imaging unit, an elevation unit, and a controlling unit. The control unit outputs a control signal for controlling the elevation unit such that a luminance variation between the outer side and the inner side of the wafer obtained by the imaging unit becomes the same as a luminance variation obtained when the imaging unit is focused, for estimating a warpage state of the wafer based on an amount of relative movement of the imaging unit and the mounting unit with respect to a relative height position of the imaging unit and the mounting unit obtained when the imaging unit is focused on a reference wafer having no warpage, and for detecting the alignment mark of the wafer by the imaging unit by rotating the mounting unit in a state where the imaging unit is focused.

Alignment apparatus and substrate processing apparatus

An interlock system can discriminate a controller in which an abnormality occurs in a control system of a semiconductor manufacturing apparatus in which a plurality of controllers are connected through a network. A processing system contains at least one processing chamber which performs a semiconductor manufacturing process. A conveyance system takes an object to be processed in and out of the processing chamber. The control system includes at least one apparatus controller, which controls the processing system and the conveyance system, and an equipment controller, which manages the apparatus controller. The apparatus controller and the equipment controller are communicably connected through a network. The apparatus controller and the equipment controller are also connected via a hard wire so as to transmit a status signal of the apparatus controller and the equipment controller to the control system so that a presence of each apparatus controller and a status of connection between the controllers can be detected without using communication through the network.

Semiconductor manufacturing apparatus detecting state of connection between controllers

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Nirasaki, Japan

Toru Yamauchi