Company Filing History:
Years Active: 2018-2022
Title: Toru Momma: Innovator in Substrate Processing Technologies
Introduction
Toru Momma is a distinguished inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technologies, holding a total of 12 patents. His innovative work focuses on improving the efficiency and effectiveness of substrate cleaning and processing methods.
Latest Patents
One of his latest patents is a treating solution supply apparatus. This apparatus is designed to supply a treating solution for treating a substrate. It includes a liquid passage that allows the treating solution to flow through, along with a pump that features a chamber with a variable volume. This chamber receives and feeds the treating solution from and to the liquid passage, while an electrically driven chamber driver varies the volume of the chamber. The arrangement of the liquid passage, chamber, and chamber driver is lateral, enhancing the apparatus's functionality.
Another notable patent involves a substrate cleaning device and a substrate processing apparatus. In this device, a polishing head contacts one surface of a substrate that is rotated by a spin chuck. The polishing head moves between the center and the outer periphery of the substrate, effectively polishing the surface and removing contaminants. The capacity for removing contaminants is adjustable based on the position in the radial direction of the substrate. This innovative approach allows for enhanced cleaning by modifying the pushing force exerted on the substrate by the polishing head.
Career Highlights
Toru Momma has established himself as a key figure in the field of substrate processing. His work at Screen Holdings Co., Ltd. has been instrumental in advancing technologies that improve substrate treatment processes. His patents reflect a deep understanding of the complexities involved in substrate cleaning and processing.
Collaborations
Throughout his career, Toru has collaborated with talented individuals such as Koji Nishi and Junki Nishimura. These collaborations have contributed to the development of innovative solutions in substrate processing technologies.
Conclusion
Toru Momma's contributions to substrate processing technologies are noteworthy and impactful. His innovative patents and collaborative efforts continue to shape the industry, making him a significant figure in the field.
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