The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Jul. 26, 2018
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Junki Nishimura, Kyoto, JP;
Hiroyuki Ogura, Kyoto, JP;
Masahito Kashiyama, Kyoto, JP;
Toru Momma, Kyoto, JP;
Shoji Kirita, Kyoto, JP;
Hidetoshi Sagawa, Kyoto, JP;
Shogo Yoshida, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 43/02 (2006.01); H01L 43/02 (2006.01); H01L 21/67 (2006.01); F04B 53/16 (2006.01); F04B 53/20 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
H01L 43/02 (2013.01); F04B 53/16 (2013.01); F04B 53/20 (2013.01); H01L 21/67017 (2013.01); G03F 7/16 (2013.01);
Abstract
A treating solution supply apparatus which supplies a treating solution for treating a substrate includes a liquid passage for allowing the treating solution to flow therethrough; and a pump including a chamber with a variable volume for receiving and feeding the treating solution from/to the liquid passage, and a chamber driver electrically driven to vary the volume of the chamber. The liquid passage, chamber, and chamber driver are arranged in the stated order laterally.