Shoji Kirita

Title: Shoji Kirita: Innovator in Substrate Processing Technology

Introduction

Shoji Kirita is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 5 patents. His innovative work focuses on enhancing the efficiency and effectiveness of maintenance devices and methods in substrate processing apparatuses.

Latest Patents

Among his latest patents is a maintenance device and method for substrate processing apparatuses. This invention involves acquiring authentication information from a storage medium through near field communication in one authentication device. The system determines whether the authentication information corresponds to a specific substrate processing apparatus. If it does, access information is transmitted from the authentication device through near field communication. An instruction terminal then receives this access information, allowing it to access a maintenance instruction device and display a maintenance screen. The instruction terminal is equipped with an operation unit for user interaction to facilitate maintenance operations. Another notable patent is a treating solution supply apparatus designed to supply a treating solution for substrate treatment. This apparatus includes a liquid passage for the solution to flow through and a pump with a variable volume chamber for receiving and feeding the solution. The arrangement of the liquid passage, chamber, and chamber driver is designed for optimal functionality.

Career Highlights

Shoji Kirita is currently employed at Screen Holdings Co., Ltd., a company known for its advancements in the field of semiconductor manufacturing equipment. His work at Screen Holdings has positioned him as a key player in the development of innovative solutions for substrate processing.

Collaborations

Throughout his career, Kirita has collaborated with notable colleagues, including Junki Nishimura and Hiroyuki Ogura. These collaborations have further enhanced his contributions to the field and fostered a culture of innovation within his team.

Conclusion

Shoji Kirita's work exemplifies the spirit of innovation in substrate processing technology. His patents reflect a commitment to improving maintenance processes and treatment solutions, making significant strides in the industry.