The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 2021

Filed:

Jul. 26, 2018
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Junki Nishimura, Kyoto, JP;

Hiroyuki Ogura, Kyoto, JP;

Masahito Kashiyama, Kyoto, JP;

Toru Momma, Kyoto, JP;

Shoji Kirita, Kyoto, JP;

Hidetoshi Sagawa, Kyoto, JP;

Shogo Yoshida, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 19/00 (2006.01); H01L 21/67 (2006.01); B05C 11/10 (2006.01); F04B 43/02 (2006.01);
U.S. Cl.
CPC ...
B01D 19/0042 (2013.01); B01D 19/0052 (2013.01); B01D 19/0057 (2013.01); B05C 11/10 (2013.01); F04B 43/02 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01);
Abstract

A chamber has a first opening, a second opening, and a third opening. The second opening is higher in level than the first and third openings, and is located at the highest position of a reservoir. Air bubbles are easily collected around the second opening, higher in level than the third opening, due to buoyancy. Moreover, the chamber includes an upper slope on an upper inner wall thereof such that a sectional area of the chamber becomes smaller toward the highest position of the reservoir. The upper slope causes the air bubbles not to stagnate but to be guided to the second opening along the upper slope. This makes easy discharge of the air bubbles from the chamber.


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