Location History:
- Nirasaki, JP (2007 - 2012)
- Yamanashi, JP (2020 - 2021)
Company Filing History:
Years Active: 2007-2021
Title: Innovation and Ingenuity: The Patents of Tomoya Okubo
Introduction
Tomoya Okubo, an accomplished inventor based in Yamanashi, Japan, has made significant contributions to the field of substrate processing. With a strong focus on advancing technology, Okubo holds a remarkable four patents, showcasing his inventive prowess and technical expertise.
Latest Patents
Among his latest innovations is a substrate processing apparatus and substrate processing method designed for efficient substrate treatment in a processing chamber. The apparatus features a unique partition unit that separates the processing space from a diffusion space where a first gas is diffused. The first gas supply unit feeds into the diffusion space, while first gas injection holes allow for the gas to be injected into the processing space. Notably, the second gas supply unit operates independently, supplying a second gas to various regions within the processing space, thereby enhancing the precision and effectiveness of the substrate processing. This innovative approach improves the handling and processing of substrates, representing a significant step forward in the field.
Career Highlights
Tomoya Okubo is currently associated with Tokyo Electron Limited, a leader in the field of semiconductor and electronics manufacturing equipment. His work at the company emphasizes his commitment to driving advancements in substrate processing technology, thereby influencing the broader industry and enhancing manufacturing capabilities.
Collaborations
Throughout his career, Okubo has collaborated with notable professionals, including Hiroyuki Ogawa and Akitaka Shimizu. Their collective expertise has fostered a rich environment for innovation and has contributed to the development of advanced technologies in semiconductor manufacturing.
Conclusion
Tomoya Okubo's innovative contributions, particularly in the realm of substrate processing, exemplify the spirit of invention and technological advancement. His patents reflect a deep understanding of manufacturing processes, positioning him as a significant figure in the field. As he continues to push the boundaries of technology at Tokyo Electron Limited, Okubo is undoubtedly paving the way for future advancements in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.