Tomohito Komatsu is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing, holding a total of 18 patents. His work has advanced the technology used in various industrial applications, particularly in semiconductor manufacturing.

Latest Patents

Among his latest innovations is a plasma processing apparatus designed to enhance the efficiency of plasma generation. This apparatus features a microwave introducing module located at the ceiling of the processing chamber, which introduces a microwave to generate plasma from a gas. Additionally, it includes multiple gas supply holes that facilitate the introduction of gas into the plasma processing space. Each gas supply hole is designed with a fine hole and an expanded cavity, optimizing the plasma processing environment. Another notable patent is the plasma probe device, which includes an antenna unit installed in a processing chamber wall. This device is engineered to maintain a vacuum while allowing for effective plasma generation.

Career Highlights

Tomohito Komatsu has worked with notable companies in the technology sector, including Tokyo Electron Limited and Tokyo Electronics Limited. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in plasma technology.

Collaborations

Throughout his career, Komatsu has collaborated with talented individuals such as Taro Ikeda and Yutaka Fujino. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Tomohito Komatsu's contributions to plasma processing technology exemplify the impact of innovation in the industrial sector. His patents and collaborations highlight the importance of teamwork and creativity in driving technological advancements.

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