The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2011
Filed:
Jul. 11, 2006
Applicant:
Tomohito Komatsu, Nirasaki, JP;
Inventor:
Tomohito Komatsu, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
F26B 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate stage mechanism () configured to place a substrate (W) thereon inside a process container of a substrate processing apparatus () and having a substrate heating function for heating the substrate (W) includes a substrate table () including a base body () configured to place the substrate (W) thereon and a heating element () provided to the base body () and configured to heat the substrate (W); a support member () having an upper end connected to the substrate table () and a lower end attached to the process container; and a heating device () configured to heat the support member ().