Location History:
- Hitachinaka, JP (2009 - 2015)
- Tokyo, JP (2015 - 2018)
Company Filing History:
Years Active: 2009-2018
Title: The Innovative Mind of Tomohiro Funakoshi
Introduction
Tomohiro Funakoshi is a distinguished inventor based in Hitachinaka, Japan, recognized for his significant contributions to the field of charged particle optics. With a remarkable portfolio of 15 patents, Funakoshi's work continues to advance the capabilities of imaging and measurement technologies.
Latest Patents
Among his most notable inventions is a **Sample Observation Device Having a Selectable Acceleration Voltage**. This device incorporates a charged particle optical column designed to irradiate a sample with charged particle beams at various acceleration voltages. It features an image acquisition part that captures images of a concave target part based on signals from the beam. Additionally, a memory component stores a pre-established relationship between brightness ratios and structural values, ensuring that the appropriateness of the acceleration voltage can be evaluated effectively.
Another significant patent by Funakoshi is related to a **Charged Particle Beam Device and Overlay Misalignment Measurement Method**. This innovation provides an accurate measurement of overlay misalignment between patterns on different layers, utilizing a charged particle beam source and multiple detectors that simultaneously generate detection signals. The integration of this technology significantly enhances the precision of overlay measurements in semiconductor manufacturing processes.
Career Highlights
Tomohiro Funakoshi is currently associated with Hitachi High-Technologies Corporation, where he leverages his expertise in charged particle optics to push the boundaries of technology. His innovative approach has not only contributed to the field of imaging but has also established new standards in measurement accuracy.
Collaborations
Funakoshi collaborates with talented colleagues such as Tsunehiro Sakai and Junko Konishi, whose combined efforts in research and development significantly increase the capabilities of their inventions.
Conclusion
In conclusion, Tomohiro Funakoshi is an influential inventor whose work in charged particle optics is reshaping the landscape of imaging and measurement technologies. His continuous innovation and commitment to excellence demonstrate the impactful role that inventors play in driving technological advancement.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.