The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Nov. 19, 2009
Junko Konishi, Hitachinaka, JP;
Tomohiro Funakoshi, Hitachinaka, JP;
Tsunehiro Sakai, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is an observation condition determination support device which can improve the defect classification accuracy. The observation condition determination support device includes: a means () for acquiring a plurality of defects images which have captured the same defect under a plurality of observation conditions set in advance in an observation device () in accordance with check data relating to defects of a semiconductor device detected by an inspection device (); a means () for classifying the plurality of the same defects according to the respective defect images and determining a first category to which the same defects belong for each of the observation conditions as a result of the classification; and a means () for determining an observation condition to be used when fabricating the semiconductor device among the plurality of the observation conditions according to the ratio at which the first category is matched with a second category determined by a user of the observation device who has classified the same defects.