The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Jan. 14, 2009
Yuji Miyoshi, Hitachinaka, JP;
Tomohiro Funakoshi, Hitachinaka, JP;
Yuji Miyoshi, Hitachinaka, JP;
Tomohiro Funakoshi, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection toolwhich measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a waferwith patterns and inspects the surface roughness of the wafer, the surface inspection tool includes a controllerwhich extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection rangeof the surface roughness inspection in a partial layoutof a part of the whole layoutof the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range