Company Filing History:
Years Active: 2013-2017
Title: Innovator Profile: Tomohiro Fukuda from Nagasaki
Introduction
Tomohiro Fukuda is a distinguished inventor based in Nagasaki, Japan, known for his contributions to the field of silicon single crystal manufacturing. With a total of four patents to his name, Fukuda has made significant strides in developing advanced technologies for more efficient and reliable semiconductor production.
Latest Patents
Among his most notable recent patents is the manufacturing method of silicon single crystal featuring low-resistivity electrical characteristics. This innovative approach involves a silicon single crystal pull-up apparatus designed to grow silicon single crystals with desired electrical resistivity. The apparatus integrates a sublimable dopant, ensuring consistent quality regardless of the time taken to form the first part of the crystal. Additionally, it employs the Czochralski method and includes essential components such as a pull-up furnace and a specially designed sample chamber for optimal performance.
Another significant patent focuses on a silicon single crystal pull-up apparatus that efficiently pulls a doped silicon single crystal from a melt. This invention features advanced mechanisms, such as a sample tube that interconnects the sample chamber and the pull-up furnace, allowing for the precise delivery of sublimable dopants. The unique ball joint structure enhances the reliability of the connection, ensuring the smooth operation required in high-tech semiconductor manufacturing.
Career Highlights
Fukuda has dedicated his career to advancing semiconductor technologies at Sumco Techxiv Corporation, a leader in silicon production. His work has not only contributed to the company's reputation as an innovator in the industry but has also played a critical role in enhancing the performance and efficiency of silicon-based products.
Collaborations
Throughout his career, Fukuda has collaborated with notable colleagues, such as Yasuhito Narushima and Shinichi Kawazoe. These partnerships have fostered an environment of innovation and have led to significant advancements in semiconductor manufacturing processes.
Conclusion
Tomohiro Fukuda's inventive spirit and commitment to excellence are evident in his patents and collaborative efforts. His work at Sumco Techxiv Corporation is helping shape the future of silicon technology, positioning him as a key player in the global semiconductor industry. As he continues to innovate, Fukuda remains a source of inspiration for aspiring inventors in the field.
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