The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Jul. 28, 2009
Yasuhito Narushima, Nagasaki, JP;
Shinichi Kawazoe, Nagasaki, JP;
Fukuo Ogawa, Nagasaki, JP;
Toshimichi Kubota, Nagasaki, JP;
Tomohiro Fukuda, Nagasaki, JP;
Yasuhito Narushima, Nagasaki, JP;
Shinichi Kawazoe, Nagasaki, JP;
Fukuo Ogawa, Nagasaki, JP;
Toshimichi Kubota, Nagasaki, JP;
Tomohiro Fukuda, Nagasaki, JP;
Sumco Techxiv Corporation, Nagasaki, JP;
Abstract
A silicon single crystal pull-up apparatus is used to pull up a doped silicon single crystal from a melt by means of the Czochralski process and includes a pull-up furnace, a sample chamber which is externally mounted on the pull-up furnace and houses a sublimable dopant, a shielding means for thermally isolating the interior of the pull-up furnace and the interior of the sample chamber, a sample tube which can be raised and lowered between the interior of the sample chamber and the interior of the pull-up furnace, and a raising and lowering means which is provided with guide rails on which the sample tube can slide and a wire mechanism by which the sample tube is raised and lowered along the guide rails.