The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2014
Filed:
Jul. 28, 2009
Yasuhito Narushima, Nagasaki, JP;
Shinichi Kawazoe, Nagasaki, JP;
Fukuo Ogawa, Nagasaki, JP;
Toshimichi Kubota, Nagasaki, JP;
Tomohiro Fukuda, Nagasaki, JP;
Yasuhito Narushima, Nagasaki, JP;
Shinichi Kawazoe, Nagasaki, JP;
Fukuo Ogawa, Nagasaki, JP;
Toshimichi Kubota, Nagasaki, JP;
Tomohiro Fukuda, Nagasaki, JP;
Sumco Techxiv Corporation, Nagasaki, JP;
Abstract
A silicon single crystal pull-up apparatus includes a pull-up furnace, a sample chamber in which a sublimable dopant is housed, a sample tube which can be raised and lowered between the interior of the sample chamber and the interior of the pull-up furnace, a raising and lowering means for raising and lowering the sample tube, a supply pipe which is installed inside the pull-up furnace and supplies the sublimable dopant to a melt, and a connection means for connecting the sample tube and the supply pipe. The connection means is constructed from a ball joint structure comprising a convex member which projects from one end of the sample tube and a concave member which is provided at one end of the supply pipe and is formed to be engageable with the convex member. The contact surfaces of the convex member and the concave member are formed to be curved surfaces.