Company Filing History:
Years Active: 2020-2025
Title: The Innovative Contributions of Tomohiko Muta
Introduction
Tomohiko Muta is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, Muta's work has had a considerable impact on the industry.
Latest Patents
Muta's latest patents include a tank designed for processing liquids and a substrate processing apparatus. The tank features a container part that includes an upper wall, sidewall, and bottom wall to store processing liquid. It also has a liquid discharge passage positioned above the liquid surface to discharge the processing liquid into the container. Additionally, a gas discharge passage is included to allow gas to be introduced into the container. This innovative design ensures efficient contact between the processing liquid and the inner surfaces of the tank.
The substrate processing apparatus patent describes a system that includes a nozzle for discharging processing liquid onto a substrate. It features a liquid feeder, a replenishment part, and a filter to remove foreign matter from the processing liquid. The apparatus is designed to optimize the replenishment process, ensuring that the liquid feeder is adequately supplied with processing liquid.
Career Highlights
Tomohiko Muta is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to develop and refine his innovative ideas, contributing to advancements in substrate processing technology.
Collaborations
Muta has collaborated with talented coworkers such as Daisuke Ishimaru and Daiki Shibata. Their combined expertise has fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Tomohiko Muta's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a significant inventor in the field. His innovative designs continue to influence the industry and pave the way for future advancements.
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