The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Oct. 21, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Takashi Sasa, Koshi, JP;
Daisuke Ishimaru, Koshi, JP;
Takahiro Okubo, Koshi, JP;
Tomoyuki Yumoto, Koshi, JP;
Tomohiko Muta, Koshi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 43/10 (2006.01); F04B 15/02 (2006.01); F04B 43/00 (2006.01); F04B 43/08 (2006.01);
U.S. Cl.
CPC ...
F04B 43/10 (2013.01); F04B 15/02 (2013.01); F04B 43/0072 (2013.01); F04B 43/08 (2013.01);
Abstract
A stay of a liquid can be suppressed. A pumpincludes a tube, having elasticity, in which a liquid as a target to be delivered flows; a tube housingwhich covers an outside of the tubeand keeps a gas in an inner space V between an outer surface of the tubeand the tube housing; and an electropneumatic regulator RE configured to supply the gas into the inner space V and discharge the gas from the inner space V.