The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Jul. 16, 2020
Tokyo Electron Limited, Tokyo, JP;
Masayuki Kajiwara, Koshi, JP;
Katsunori Ichino, Koshi, JP;
Daisuke Ishimaru, Koshi, JP;
Takuya Tajiri, Koshi, JP;
Atsushi Yamamoto, Koshi, JP;
Masato Imamura, Koshi, JP;
Tomohiko Muta, Koshi, JP;
Tetsuro Iriyama, Koshi, JP;
Takeaki Sakamoto, Koshi, JP;
Hiroki Okaguchi, Koshi, JP;
Kenji Adachi, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate processing apparatus includes a discharge part including a nozzle configured to discharge a processing liquid onto a substrate; a liquid feeder configured to feed the processing liquid to the discharge part; a replenishment part configured to replenish the liquid feeder with the processing liquid to be fed to the discharge part; a connector including a switching valve configured to open/close a flow path between the replenishment part and the liquid feeder; a filter configured to remove foreign matters contained in the processing liquid; a replenishment preparation part configured to open the switching valve after reducing a pressure difference between the inside of the replenishment part and the liquid feeder; and a replenishment controller configured to start replenishment of the processing liquid from the replenishment part to the liquid feeder in a state in which the switching valve is opened by the replenishment preparation part.