Katsunori Ichino, located in Koshi, Japan, is a distinguished inventor known for his remarkable contributions to substrate processing technology. With an impressive portfolio of 13 patents, Ichino continues to push the boundaries of innovation within his field, significantly impacting various industries.

Latest Patents

Among his latest innovations are patents related to substrate processing apparatus and methods. One key patent describes a substrate processing apparatus that integrates a discharge part equipped with a nozzle to effectively discharge processing liquid onto substrates. It features a liquid feeder that feeds the processing liquid, along with a replenishment part that ensures the liquid feeder is replenished efficiently. Additional components include a filter to eliminate foreign matters, a connector with a switching valve, and a replenishment controller that meticulously manages the liquid replenishment process.

Another significant patent outlines a substrate processing method utilizing a rotary holder to hold and rotate the substrate. This innovative design incorporates a liquid supplier with a nozzle that ejects processing liquid in a controlled manner. The controller manages the supply trajectory in a spiral shape while gradually reducing the ejection amount of the processing liquid, ensuring efficiency during the substrate processing.

Career Highlights

Katsunori Ichino has made substantial contributions to Tokyo Electron Limited, a leading company in semiconductor manufacturing equipment. His work emphasizes the importance of precision in substrate processing, which is crucial for producing high-quality electronic components. Ichino's patents reflect a deep understanding of the challenges faced in this industry and present innovative solutions to enhance processing efficiency.

Collaborations

Throughout his career, Ichino has had the privilege of collaborating with talented individuals such as Kousuke Yoshihara and Yuichi Terashita. These collaborations have allowed him to refine his ideas and push forward groundbreaking advancements in substrate processing technology.

Conclusion

Katsunori Ichino is an exemplary inventor whose contributions have significantly impacted the field of substrate processing. With 13 patents to his name and innovative solutions emerging from his latest work, Ichino’s expertise continues to pave the way for advancements in semiconductor manufacturing technologies, showcasing the importance of innovation in today’s technology-driven world.

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