Ting-Hao Hsu

Title: Innovations by Ting-Hao Hsu in Advanced Imaging Technologies

Introduction

Ting-Hao Hsu, located in Hsinchu, Taiwan, is an accomplished inventor with a remarkable portfolio of 26 patents. His expertise in optical technologies and surface inspection methods has significantly contributed to advancements in the field of semiconductor manufacturing and inspection, making him a vital figure in the industry.

Latest Patents

Among his recent innovations, Ting-Hao Hsu has developed a "Method of Fast Surface Particle and Scratch Detection for EUV Mask Backside." This technique involves scanning a substrate using a converging beam of light that encompasses multiple wavelengths. Each wavelength focuses at a specific distance around the surface, allowing for the precise determination of surface scratches based on the wavelength of the reflected light with the highest intensity.

Another noteworthy patent is the "High Throughput and High Position Accurate Method for Particle Inspection of Mask Pods." This method entails directing a stream of air at various locations on a mask pod's outer surface to remove and analyze particles. By determining the number of particles in the extracted scattered air, a comprehensive map of particles can be generated, optimizing the inspection process for mask pods.

Career Highlights

Ting-Hao Hsu's professional journey includes significant roles at leading institutions such as Taiwan Semiconductor Manufacturing Company Limited and National Taiwan University. His work at these organizations has allowed him to merge academic research with practical applications in the semiconductor industry, enhancing the quality and reliability of imaging technologies.

Collaborations

Throughout his career, Ting-Hao has collaborated with notable colleagues, including Sheng-Chi Chin and Ching-Fang Yu. These partnerships have not only enriched his research experience but have also fostered a collaborative environment for innovation, advancing the field of surface inspection technology.

Conclusion

Ting-Hao Hsu's dedication to innovation and excellence has made him a prominent inventor in the realm of optical inspection technologies. With a robust portfolio of patents and impactful collaborations, he continues to contribute significantly to the advancements in semiconductor manufacturing and related fields.