Tim W Herbst

Title: Tim W Herbst: Innovator in Semiconductor Fabrication Technologies

Introduction

Tim W Herbst is a notable inventor based in Minneapolis, MN, with a focus on innovations in semiconductor fabrication technologies. He holds two patents that showcase his contributions to the field, particularly in the design of advanced chuck systems for processing microelectronic substrates.

Latest Patents

One of his latest patents is for a "Translating and rotating chuck for processing microelectronic substrates in a process chamber." This invention features cleaning systems and methods that utilize rotatable and translatable chuck assemblies. These assemblies incorporate a compact drive system that minimizes components that could generate contamination, making the chuck particularly useful in cryogenic cleaning treatments.

Another significant patent is the "Edge gripping device for handling a set of semiconductor wafers in an immersion processing system." This device consists of first and second support structures that are spaced apart, with the first support structure featuring a series of upper and lower teeth. These teeth define notches that allow for the secure handling of microelectronic devices, ensuring they fit properly during processing.

Career Highlights

Tim has worked with several companies throughout his career, including FSI International, Inc. and Tel Manufacturing and Engineering of America, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and fabrication processes.

Collaborations

Tim has collaborated with notable coworkers such as Todd K Maciej and Tracy A Gast, further enhancing his work in the semiconductor field.

Conclusion

Tim W Herbst's innovative patents and career in semiconductor fabrication highlight his significant contributions to the industry. His work continues to influence advancements in microelectronic processing technologies.