The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Nov. 11, 2002
Tim W. Herbst, Minneapolis, MN (US);
Todd K. Maciej, Little Falls, MN (US);
Tracy A. Gast, Waconia, MN (US);
Thomas J. Wagener, Shorewood, MN (US);
Kevin L. Siefering, Excelsior, MN (US);
Tim W. Herbst, Minneapolis, MN (US);
Todd K. Maciej, Little Falls, MN (US);
Tracy A. Gast, Waconia, MN (US);
Thomas J. Wagener, Shorewood, MN (US);
Kevin L. Siefering, Excelsior, MN (US);
FSI International, Inc., Chaska, MN (US);
Abstract
A microelectronic substrate handling device comprising first and second support structures spaced from each other, the first support structure having a series of upper teeth defining a series of upper notches extending along a length of the first support structure and a series of lower teeth defining a series of lower notches extending along a length of the first support structure, each of the upper and lower notches opening toward the second support structure, wherein the upper and lower notches are offset from each other by a predetermined offset distance so that an edge of a microelectronic device will fit differently within the upper and lower notches of the first support structure when supported between the first and second support structures.