Location History:
- Kawasaki, JP (1992 - 2001)
- Kanagawa-ken, JP (1997 - 2003)
- Yokohama, JP (1994 - 2005)
- Ageo, JP (2001 - 2006)
Company Filing History:
31 out of 8,898 
1 out of 849 
1 out of 2 Years Active: 1992-2006
Title: The Innovations of Tetsuo Taniguchi: A Pioneer in Semiconductor Technology
Introduction: Tetsuo Taniguchi, based in Yokohama, Japan, is a prominent inventor known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio comprising 33 patents, his work has greatly influenced the efficiency and precision of semiconductor manufacturing processes.
Latest Patents: Among his latest inventions are two noteworthy patents focused on improving exposure accuracy in semiconductor fabrication. The first patent describes a projection exposure apparatus and method that enhances pattern transfer accuracy by reducing contamination caused by photosensitive agents on optical members. This innovation allows for effective substrate pattern transfer either after cleaning the optical member or by utilizing a contamination protection device that ensures cleanliness during the exposure process.
The second patent pertains to a stage device and exposure apparatus designed specifically for semiconductor device production. This device features mobility beyond the measurement area of interferometers, enabling high-precision position measurement. By incorporating wafer alignment sensors, Taniguchi's invention ensures accurate calibration when transitioning into measurement areas, thereby improving overall alignment and manufacturing precision.
Career Highlights: Throughout his career, Tetsuo Taniguchi has made significant strides in semiconductor technology. He has worked with well-respected companies, including Nikon Corporation and Nippon Kogaku K.K., where his expertise has been pivotal in advancing the field. His numerous patents reflect his commitment to innovation and excellence in semiconductor manufacturing.
Collaborations: Taniguchi's collaborations with esteemed colleagues, such as Toshihiko Tsuji and Naomasa Shiraishi, have further enriched his research and development efforts. Through teamwork and shared expertise, they have collectively contributed to groundbreaking advancements in the industry.
Conclusion: Tetsuo Taniguchi stands out as a visionary inventor whose work continues to leave a lasting impact on semiconductor technology. His 33 patents not only showcase his innovative spirit but also underscore the importance of precise engineering in the manufacturing of electronic devices. As technology evolves, Taniguchi's contributions will remain influential in shaping the future of semiconductor production.