The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2004
Filed:
Oct. 11, 2002
Tetsuo Taniguchi, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An apparatus is provided with an illumination optical system for irradiating illumination light from a light source onto a predetermined illumination area on a mask and a projection optical system for projecting a pattern formed on the mask onto a photosensitive substrate. The apparatus synchronously moves the mask and the substrate in predetermined scanning directions perpendicular to an optical axis of the projection optical system thereby to effect scanning exposure of a projected image of the pattern on the substrate. The apparatus comprises a device for inputting information on a distortion of a pattern having been already formed on the substrate, in a direction perpendicular to the scanning directions, and a device for controlling imaging characteristics of the projection optical system, based on the information thus input.