The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Jul. 26, 2001
Applicant:
Inventor:
Tetsuo Taniguchi, Yokohama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ;
Abstract
A scanning exposure method and apparatus in which a scanning exposure is performed while a mask is moved in a first direction and a substrate is moved in a second direction, and in which, during the scanning exposure, positional information of the mask is measured using a first interferometer system and positional information of the substrate is measured using a second interferometer system which has five measurement axes including two first measurement axes parallel to the second direction and two second measurement axes perpendicular to the second direction.