Company Filing History:
Years Active: 2020-2023
Title: Tetsu Tsunamoto: Innovator in Plasma Processing Technology
Introduction
Tetsu Tsunamoto is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 4 patents. His innovative approaches have advanced the efficiency and effectiveness of various processing methods.
Latest Patents
Tsunamoto's latest patents include a control method and plasma processing apparatus. This control method involves connecting a power supply to an electrode of an electrostatic chuck inside a chamber and applying a voltage from the power supply to the electrode. After establishing the connection, the method switches to a non-connection state before supplying gas into the chamber to generate plasma. The potential of the electrode is then measured during this process. Another significant patent is a discharging method and substrate processing apparatus. This method focuses on removing electric charge from a substrate by supplying gas into a processing chamber while the substrate is placed on an electrostatic chuck. A direct-current (DC) voltage is applied to the attracting electrode until discharge occurs, after which the DC voltage is adjusted to ensure the charge on the substrate is neutralized.
Career Highlights
Tsunamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work has been instrumental in developing advanced technologies that enhance processing capabilities.
Collaborations
Tsunamoto collaborates with esteemed colleagues, including Masanori Sato and Yoshinori Osaki. Their combined expertise contributes to the innovative projects at Tokyo Electron Limited.
Conclusion
Tetsu Tsunamoto's contributions to plasma processing technology exemplify the impact of innovation in the field. His patents and collaborative efforts continue to shape advancements in the industry.