The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2020
Filed:
Aug. 22, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Masanori Sato, Miyagi, JP;
Ryusei Kashimura, Miyagi, JP;
Tetsu Tsunamoto, Miyagi, JP;
Yoshinori Osaki, Miyagi, JP;
Toshiyuki Arakane, Miyagi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32577 (2013.01); H01J 37/32522 (2013.01); H01J 37/32697 (2013.01); H01J 37/32724 (2013.01); H01J 37/32862 (2013.01); H01J 37/32926 (2013.01); H01J 37/32981 (2013.01); H01L 21/67253 (2013.01); H01L 21/6833 (2013.01); H01J 2237/334 (2013.01);
Abstract
A measuring device includes a switch that switches a connection of an electrode to which a direct current voltage is applied, wherein the electrode is within an electrostatic chuck disposed in a plasma processing device; a component provided with electrostatic capacitance, wherein the component is connected to the switch; and a measuring unit that measures a value corresponding to an electric charge amount accumulated in the component provided with the electrostatic capacitance.