Company Filing History:
Years Active: 2020-2023
Title: The Innovations of Toshiyuki Arakane
Introduction
Toshiyuki Arakane is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology. With a total of 3 patents to his name, Arakane's work has had a considerable impact on the industry.
Latest Patents
Arakane's latest patents include a control method and plasma processing apparatus. This control method involves connecting a power supply to an electrode of an electrostatic chuck inside a chamber and applying a voltage from the power supply to the electrode. After this step, the connection between the electrode and the power supply is switched to a non-connection state. Following this, gas is supplied into the chamber to generate plasma, and the potential of the electrode is measured during this process. Another significant patent is a discharging method and substrate processing apparatus. This method focuses on removing electric charge from a substrate by supplying gas into a processing chamber while the substrate is placed on an electrostatic chuck. A direct-current (DC) voltage is applied to an attracting electrode of the electrostatic chuck until discharge occurs in the processing chamber. After the discharge, the DC voltage is adjusted to ensure that the amount of charge on the substrate becomes zero or close to zero, allowing for the substrate to be removed from the electrostatic chuck.
Career Highlights
Toshiyuki Arakane is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in technology.
Collaborations
Arakane has collaborated with several talented individuals in his field, including Masanori Sato and Tetsu Tsunamoto. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of new technologies.
Conclusion
Toshiyuki Arakane's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his importance as an inventor. His innovative methods continue to influence the industry and pave the way for future advancements.