Tarek Lutz

Title: Tarek Lutz: Innovator in Semiconductor Technology

Introduction

Tarek Lutz is a prominent inventor based in Munich, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on innovative processes and apparatuses that enhance the production and evaluation of semiconductor masks.

Latest Patents

One of Tarek Lutz's latest patents is a process for producing a mask. In this process, layout data is provided for a semiconductor layout. The layout data is fractionated to create control data for a pattern generator. Slivers are identified from the fractionating step, and second control data can be created from an enlarged imaging of the slivers. A first exposure can then be carried out using the control data, followed by a second exposure using the second data, which is conducted with a lower exposure dose compared to the first exposure.

Another notable patent is an apparatus and method for determining physical properties of a mask blank. This apparatus includes an illumination device that radiates predetermined light laterally into the mask blank. A detection device, positioned opposite the illumination device, detects the light that has been scattered or has passed through the mask blank. An evaluation device determines the properties of the mask blank based on the detected light. This invention also provides a method for assessing the physical properties of a mask blank.

Career Highlights

Tarek Lutz is currently employed at Infineon Technologies AG, a leading company in semiconductor solutions. His role involves developing innovative technologies that push the boundaries of semiconductor manufacturing. His expertise and contributions have been instrumental in advancing the company's research and development efforts.

Collaborations

Tarek collaborates with several talented individuals, including Jens Schneider and Christian Ebi. Their teamwork fosters an environment of innovation and creativity, leading to groundbreaking advancements in semiconductor technology.

Conclusion

Tarek Lutz is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the field. His patents reflect a commitment to innovation and excellence, making him a valuable asset to Infineon Technologies AG and the broader scientific community.