The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Dec. 24, 2003
Tarek Lutz, München, DE;
Markus Menath, Regensburg, DE;
Tarek Lutz, München, DE;
Markus Menath, Regensburg, DE;
Infineon Technologies AG, Munich, DE;
Abstract
An apparatus for determining physical properties of a mask blank. The apparatus includes, for example, an illumination device for radiating a predetermined light laterally into the mask blank, a detection device opposite the illumination device for detecting the light which has been scattered and/or runs through the mask blank, and an evaluation device for determining predetermined properties of the mask blank from the light which has been scattered and/or has run through the mask blank and has been detected in the detection device. The present invention likewise provides a method for determining physical properties of a mask blank.