Takuya Kubo

Title: Takuya Kubo: Innovator in Plasma Processing Technology

Introduction

Takuya Kubo is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 11 patents. His innovative approaches have advanced the methods used in etching and substrate processing.

Latest Patents

One of Kubo's latest patents is an etching method that involves etching a wafer by sputtering using ions in plasma. This method includes accommodating the wafer in a plasma processing apparatus and etching a multilayer film by sputtering. The wafer features a multilayer film containing a non-volatile material and a mask layer on its surface. The exposed space of the region not covered by the mask layer is critical to the etching process. The aspect ratio h/D, which is the height of the mask layer divided by the distance between adjacent sidewalls, must satisfy a specific condition for optimal results.

Another notable patent is a method for processing a substrate, which consists of three steps. The substrate includes an etching layer and a mask formed on its surface. The first step involves forming a first film on the second surface of the mask. The second step creates a second film with material from the etching layer on the first film by etching the first surface of the etching layer. The third step removes both films by exposing the substrate to plasma of a processing gas, which includes oxygen.

Career Highlights

Kubo has worked with notable companies such as Tokyo Electron Limited and Canon Inc. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the industry.

Collaborations

Throughout his career, Kubo has collaborated with talented individuals, including Song Yun Kang and Keiichi Shimoda. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Takuya Kubo's work in plasma processing technology exemplifies the spirit of innovation. His patents reflect a deep understanding of the complexities involved in etching and substrate processing. Kubo continues to be a significant figure in the field, driving advancements that benefit various industries.