Location History:
- Yamaguchi, JP (2006 - 2009)
- Ube, JP (1980 - 2012)
Company Filing History:
Years Active: 1980-2012
Title: Takumi Kadota: Innovator in Organoruthenium Complexes and Semiconductor Manufacturing
Introduction
Takumi Kadota is a prominent inventor based in Ube, Japan, known for his significant contributions to the field of organoruthenium complexes and semiconductor manufacturing. With a total of six patents to his name, Kadota has made remarkable advancements that enhance the reliability and efficiency of semiconductor devices.
Latest Patents
Among his latest patents, Kadota has developed an organoruthenium complex and a method for the production of ruthenium thin films using this complex. The organoruthenium complex, represented by a specific general formula, includes compounds such as bis(acetylacetonato)(1,5-hexadiene)ruthenium and bis(acetylacetonato)(1,3-pentadiene). These compounds exhibit low melting points and exceptional stability against moisture, air, and heat, making them suitable for film formation through a chemical vapor deposition (CVD) method. Additionally, he has disclosed a method for manufacturing semiconductor devices that reduces the resistance of copper wiring containing a ruthenium-containing film, thereby improving device reliability.
Career Highlights
Kadota has worked with notable companies such as Ube Industries, Inc. and Ulvac, Inc., where he has applied his expertise in materials science and semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor devices, particularly in the integration of ruthenium films.
Collaborations
Throughout his career, Kadota has collaborated with esteemed colleagues, including Chihiro Hasegawa and Hiroki Kanato. These partnerships have fostered innovation and contributed to the successful development of his patented technologies.
Conclusion
Takumi Kadota's innovative work in organoruthenium complexes and semiconductor manufacturing has positioned him as a key figure in the field. His patents reflect a commitment to enhancing the performance and reliability of semiconductor devices, showcasing his impact on technology and innovation.