The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2009
Filed:
Mar. 15, 2005
Takumi Kadota, Yamaguchi, JP;
Chihiro Hasegawa, Yamaguchi, JP;
Kouhei Watanuki, Yamaguchi, JP;
Hiroyuki Sakurai, Yamaguchi, JP;
Hiroki Kanato, Yamaguchi, JP;
Takumi Kadota, Yamaguchi, JP;
Chihiro Hasegawa, Yamaguchi, JP;
Kouhei Watanuki, Yamaguchi, JP;
Hiroyuki Sakurai, Yamaguchi, JP;
Hiroki Kanato, Yamaguchi, JP;
UBE Industries, Ltd., Ube-Shi, Yamaguchi, JP;
Abstract
To provide a metal complex compound capable of being suitably used for manufacturing a metal-containing thin film by the CVD method and a method for preparing a metal-containing thin film. A metal complex compound comprising a β-diketonato ligand having an alkoxyalkyl-methyl group, and a method for preparing a metal-containing thin film using the metal complex compound by the CVD method.