The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 06, 2012

Filed:

Jul. 26, 2007
Applicants:

Takumi Kadota, Ube, JP;

Chihiro Hasegawa, Ube, JP;

Hiroki Kanato, Ube, JP;

Hiroshi Nihei, Ube, JP;

Inventors:

Takumi Kadota, Ube, JP;

Chihiro Hasegawa, Ube, JP;

Hiroki Kanato, Ube, JP;

Hiroshi Nihei, Ube, JP;

Assignee:

Ube Industries, Ltd, Ube-shi, Yamaguchi, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/00 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An organoruthenium complex represented by the general formula (1-1), bis(acetylacetonato)(1,5-hexadiene)ruthenium and bis(acetylacetonato)(1,3-pentadiene)ruthenium have low melting points, show excellent stability against moisture, air and heat, and are suitable for the film formation by a CVD method. (1-1) wherein X represents a group represented by the general formula (1-2); Y represent a group represented by the general formula (1-2) or a linear or branched alkyl group having 1 to 8 carbon atoms; Z represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; and L represents an unsaturated hydrocarbon compound having at least two double bonds: (1-2) wherein Rand Rindependently represent a linear or branched alkyl group having 1 to 5 carbon atoms.


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