Location History:
- Tsukuba, JP (2016)
- Nirasaki, JP (2018 - 2021)
Company Filing History:
Years Active: 2016-2021
Title: Taiki Katou: Innovator in SiC Film Technology
Introduction
Taiki Katou is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the development of methods for forming silicon carbide (SiC) films. With a total of 3 patents to his name, Katou's work is paving the way for advancements in electronic devices.
Latest Patents
Katou's latest patents include a film forming method for SiC film, which involves activating a surface of the target substrate using activation gas plasma. This innovative method allows for the formation of a SiC film by supplying a source gas containing a precursor. The chemical formula used in this process is represented as RSiX or RSiHClX, where R is an organic group with an unsaturated bond, and X is selected from a group consisting of H, F, Cl, Br, and I.
Another notable patent is a film forming method and apparatus designed to create a sealing film for devices formed on a substrate. This method includes supplying a mixture gas containing a silicon-containing gas and a halogen element-containing gas, generating plasma within a processing container, and forming a sealing film to cover the device.
Career Highlights
Taiki Katou is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing technologies that enhance the performance and reliability of electronic devices.
Collaborations
Throughout his career, Katou has collaborated with talented individuals such as Kazuki Yamada and Masato Morishima. These collaborations have contributed to the innovative solutions and advancements in semiconductor technology.
Conclusion
Taiki Katou's contributions to the field of semiconductor technology, particularly in SiC film formation, highlight his role as a key innovator. His patents and work at Tokyo Electron Limited demonstrate his commitment to advancing technology in the electronics industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.