Tae-Hong Kim

Title: Innovations of Tae-Hong Kim

Introduction

Tae-Hong Kim is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of wafer cleaning technology, holding a total of 12 patents. His work has been instrumental in advancing methods and apparatuses used in the semiconductor industry.

Latest Patents

One of his latest patents is a wafer cleaning apparatus and a wafer cleaning method using the same. This innovative method involves providing a wafer on a stage inside a chamber, where the wafer is fixed by a grip pin. The process begins with the supply of ultrapure water onto the rotating wafer at a first rotation speed. The grip pin is then released, allowing for a development process that involves supplying liquid chemicals while the wafer rotates at a slower second rotation speed. The apparatus includes a chamber for loading the wafer, a nozzle for applying liquid chemicals, a housing, a laser module for irradiating the wafer, and a controller to manage the laser's operation and maintain the wafer's temperature.

Career Highlights

Tae-Hong Kim has worked with notable companies such as Samsung Electronics Co., Ltd. and Snur & Db Foundation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in wafer cleaning technologies.

Collaborations

Throughout his career, Tae-Hong Kim has collaborated with talented individuals, including Young-Hoo Kim and Seung Min Shin. These partnerships have fostered a creative environment that has led to the development of advanced technologies.

Conclusion

Tae-Hong Kim's contributions to wafer cleaning technology exemplify his innovative spirit and dedication to advancing the semiconductor industry. His patents and collaborations reflect a commitment to excellence and a drive to push the boundaries of technology.