The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2023
Filed:
Nov. 22, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Hun Jae Jang, Suwon-si, KR;
Seung Min Shin, Suwon-si, KR;
Seok Hoon Kim, Suwon-si, KR;
In Gi Kim, Suwon-si, KR;
Tae-Hong Kim, Suwon-si, KR;
Kun Tack Lee, Suwon-si, KR;
Jinwoo Lee, Suwon-si, KR;
Ji Hoon Cha, Suwon-si, KR;
Yong Jun Choi, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.