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Susumu Gotoh

USPTO Granted Patents = 8

EPO Patents = 1 (Patent Applications = 1)

Average Co-Inventor Count = 2.7

ph-index = 5

Forward Citations = 214(Granted Patents)

Location History:

Hachiohji, JP (1992)
Tama, JP (1998 - 2001)
Tokyo, JP (2004 - 2006)

Company Filing History:

7 out of 90,809

Canon Kabushiki Kaisha

Hitachi-High-Technologies Corporation

1 out of 832,912

Other

patents

where one patent can have more than one assignee

Years Active: 1992-2006

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7049607 - Electron beam writing equipment and electron beam writing method (2006-05-23),

2. 6838682 - Electron beam exposure equipment and electron beam exposure method (2005-01-04),

3. 6809319 - Electron beam writing equipment and electron beam writing method (2004-10-26),

4. 6323499 - Electron beam exposure apparatus and method, and device manufacturing method (2001-11-27),

5. 6166387 - Electron beam exposure apparatus and method (2000-12-26),

6. 5973332 - Electron beam exposure method, and device manufacturing method using same (1999-10-26),

7. 5834783 - Electron beam exposure apparatus and method, and device manufacturing (1998-11-10),

8. 5164974 - X-ray exposure apparatus (1992-11-17),

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