SungKyu Kang

Title: Innovations of SungKyu Kang in Semiconductor Technology

Introduction

SungKyu Kang is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced methods for thin film formation and gap filling in semiconductor substrates.

Latest Patents

One of his latest patents is a thin film forming method that involves a substrate processing technique for filling a gap without seams or voids. This method includes providing a substrate with a gap in a reaction chamber, pumping down the chamber to a pressure at or below 5 Torr, and filling the gap with a film by alternately supplying a precursor, a reactant, and radio frequency electromagnetic radiation. Another significant patent is related to filling a gap in a three-dimensional structure on a semiconductor substrate. This method involves depositing a thin film on a three-dimensional structure using a reaction gas activated with a first radio frequency power, followed by etching the deposited film with a second RF power. The process can be repeated until the trench or hole is completely filled with a thin film that is substantially free of voids and seams.

Career Highlights

SungKyu Kang is currently employed at ASM IP Holding B.V., where he continues to innovate in the semiconductor industry. His expertise in thin film technology has positioned him as a key player in advancing semiconductor manufacturing processes.

Collaborations

He has collaborated with notable colleagues such as HieChul Kim and ManSu Lee, contributing to various projects that enhance semiconductor technology.

Conclusion

SungKyu Kang's innovative work in semiconductor technology, particularly in thin film formation and gap filling methods, showcases his significant impact on the industry. His patents reflect a commitment to advancing technology and improving manufacturing processes in the semiconductor field.