Su-Yuan Chang

Title: Su-Yuan Chang: Innovator in Photodiode Manufacturing

Introduction

Su-Yuan Chang is a prominent inventor based in Hsinchu Hsien, Taiwan. She has made significant contributions to the field of semiconductor technology, particularly in the manufacturing of photodiodes. With a total of seven patents to her name, her work has had a substantial impact on the efficiency and cost-effectiveness of semiconductor production.

Latest Patents

One of her latest patents is a method of manufacturing a photodiode. This innovative method involves forming the photodiode on a substrate of a first conductive type. Initially, an isolation structure is created in the substrate to define a photosensitive area. Subsequently, trenches are formed in the substrate, followed by the formation of a doped layer of a second conductive type that covers the inner walls of the trenches and the top portion of the substrate. This method not only reduces overall processing time and cost but also enhances production efficiency.

Another notable patent is a method of fabricating conductive lines with a silicide layer. In this process, a substrate with a polysilicon layer is utilized. A mask layer with an opening exposing the polysilicon layer is formed, and spacers are created on the sidewalls of the mask layer. Using this setup, a portion of the polysilicon layer is removed to expose the substrate. An insulating layer is then formed over the substrate, which has different etching selectivity compared to the mask layer. Finally, the mask layer is removed, and a metal silicide layer is formed on the upper surface of the polysilicon layer.

Career Highlights

Su-Yuan Chang has worked with notable companies in the semiconductor industry, including Powerchip Semiconductor Corporation and Taiwan Semiconductor Manufacturing Company. Her experience in these organizations has allowed her to refine her skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Throughout her career, Su-Yuan has collaborated with esteemed colleagues such as Ko-Hsing Chang and Min-San Huang. These partnerships have fostered an environment of innovation and have led to the development of several impactful technologies.

Conclusion

Su-Yuan Chang's contributions to the field of semiconductor manufacturing, particularly in photodiode technology, highlight her role as a leading inventor. Her innovative methods and collaborations have significantly advanced the efficiency of semiconductor production.