Hsinchu, Taiwan

Su-Horng Lin


Average Co-Inventor Count = 1.7

ph-index = 5

Forward Citations = 79(Granted Patents)


Company Filing History:


Years Active: 2006-2025

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24 patents (USPTO):

Title: Innovations of Su-Horng Lin: A Leader in Semiconductor Patents

Introduction: Su-Horng Lin, located in Hsinchu, Taiwan, is a prolific inventor in the semiconductor industry, holding a remarkable 22 patents. His expertise has contributed significantly to advancements in semiconductor manufacturing processes, enhancing both efficiency and precision.

Latest Patents: Among his latest innovations is an interface tool featuring a closed gas circulation system, which includes a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet. This advanced system aims to contain, filter, condition, and recirculate gas through the chamber of the interface tool. By maintaining the gas in a controlled environment, this technology reduces the introduction of external air into the chamber, allowing for precise control over relative humidity and oxygen concentration. Such control minimizes oxidation of semiconductor wafers during transfers, ultimately improving product quality. Additionally, another significant patent involves a metrology method that illuminates a wafer with X-rays, detects spatial domain patterns, and analyzes these patterns to obtain a detailed morphology of transistor structures on the wafer.

Career Highlights: Su-Horng Lin is affiliated with Taiwan Semiconductor Manufacturing Company (TSMC), a leading global player in semiconductor manufacturing. His role has placed him at the forefront of technological innovations that are essential for the development of cutting-edge semiconductors.

Collaborations: Lin has collaborated with esteemed colleagues such as Chi-Ming Yang and Lin-Jung Wu, further enhancing the collaborative efforts within the semiconductor innovation landscape. These partnerships have been instrumental in advancing research and developing new methodologies that align with industry needs.

Conclusion: Su-Horng Lin's contributions to the semiconductor sector, showcased through his extensive patent portfolio, reflect a commitment to innovation and excellence. His work not only advances technology but also impacts the broader field of semiconductor manufacturing, ensuring that processes are increasingly efficient and precise.

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