Location History:
- Saratoga, CA (US) (2014)
- Santa Clara, CA (US) (2018 - 2022)
Company Filing History:
Years Active: 2014-2022
Title: Su Ho Cho: Innovator in Plasma Processing and Solar Cell Technology
Introduction
Su Ho Cho is a prominent inventor based in Santa Clara, CA (US). He has made significant contributions to the fields of plasma processing and solar cell technology. With a total of 5 patents to his name, Cho continues to push the boundaries of innovation in his industry.
Latest Patents
One of Cho's latest patents is titled "Reactor design for large-area VHF plasma processing with improved uniformity." This invention discloses an apparatus for plasma processing of substrates, featuring a plasma processing chamber that includes a chamber body and a lid. The lid is designed with a faceplate coupled to a backing plate, which is situated within a processing volume defined by the chamber body and the lid. Additionally, one or more ferrite blocks are attached to the backing plate to modulate an electromagnetic field created by an RF current from an RF generator. The gas feed assembly, which includes a gas source, a remote plasma source, and a zero field feed through, is also integrated into the processing volume through the backing plate and faceplate.
Another notable patent is the "Exchange and flip chamber design for heterojunction solar cell formation." In this embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume. A frame within the interior volume is sized to receive multiple substrates in a first orientation. A rotational drive assembly is coupled to the frame, allowing it to rotate and flip each substrate to a second orientation that differs from the first.
Career Highlights
Su Ho Cho is currently employed at Applied Materials, Inc., where he applies his expertise in developing advanced technologies. His work has significantly impacted the efficiency and effectiveness of plasma processing and solar cell manufacturing.
Collaborations
Throughout his career, Cho has collaborated with notable colleagues, including Shuran Sheng and Shinobu Abe. These partnerships have fostered innovation and contributed to the advancement of technology in their respective fields.
Conclusion
Su Ho Cho is a distinguished inventor whose work in plasma processing and solar cell technology has led to multiple patents and significant advancements in the industry. His contributions continue to shape the future of these technologies.