The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Nov. 14, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kyung-Tae Kim, Suwon, KR;
Su Ho Cho, Santa Clara, CA (US);
Tsunehiko Kitamura, Santa Clara, CA (US);
Shinobu Abe, Osaka, JP;
Shuran Sheng, Saratoga, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/677 (2006.01); H01L 31/18 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67796 (2013.01); H01L 21/6719 (2013.01); H01L 21/6776 (2013.01); H01L 21/67712 (2013.01); H01L 21/67718 (2013.01); H01L 31/18 (2013.01); Y02P 70/521 (2015.11);
Abstract
In one embodiment, a chamber is provided that includes a chamber body and a lid defining an interior volume, a frame within the interior volume, the frame sized to receive a plurality of substrates in a first orientation, and a rotational drive assembly coupled to the frame for rotating the frame and flipping each of the plurality of substrates to a second orientation that is different than the first orientation.