Company Filing History:
Years Active: 2017-2022
Title: Innovations of Shinobu Abe in Plasma Processing Technology
Introduction
Shinobu Abe is a prominent inventor based in Osaka, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on improving the efficiency and uniformity of plasma processing systems, which are essential in various manufacturing processes.
Latest Patents
One of Shinobu Abe's latest patents is titled "Reactor design for large-area VHF plasma processing with improved uniformity." This invention discloses an apparatus for plasma processing of substrates, featuring a plasma processing chamber that includes a chamber body and a lid. The lid is designed with a faceplate coupled to a backing plate, which is situated within a processing volume defined by the chamber body and the lid. The design incorporates ferrite blocks that modulate the electromagnetic field created by an RF current from an RF generator. Additionally, a gas feed assembly is included, which connects to the processing volume through the backing plate and faceplate.
Another notable patent is the "Exchange and flip chamber design for heterojunction solar cell formation." This invention provides a chamber that includes a body and a lid defining an interior volume. Within this volume, a frame is sized to receive multiple substrates in a first orientation. A rotational drive assembly is coupled to the frame, allowing for the rotation and flipping of each substrate to a second orientation, enhancing the efficiency of solar cell formation.
Career Highlights
Shinobu Abe is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to further develop his innovative ideas and contribute to advancements in plasma processing technology.
Collaborations
Shinobu has collaborated with notable colleagues, including Shuran Sheng and Su Ho Cho. Their combined expertise has fostered a productive environment for innovation and development in their respective fields.
Conclusion
Shinobu Abe's contributions to plasma processing technology through his patents and work at Applied Materials, Inc. highlight his role as a key innovator in the industry. His inventions not only improve processing efficiency but also pave the way for advancements in related technologies.