Steven W Meeks

This inventor holds 72 USPTO granted patents and 1 published patent application and 3 EPO patents, primarily in Optical Inspection (CPC class G01N). Top assignees: Kla-Tencor Technologies Corporation, Kla Tencor Corporation, Candela Instruments. Active years: 1996-2024.

USPTO Granted Patents = 72 (Patent Applications = 1)

% Patents Active = 75.0

EPO Patents = 3 (Patent Applications = 3)

Average Co-Inventor Count = 2.1

ph-index = 18

Forward Citations = 850(Granted Patents)

Forward Citations (Not Self Cited) = 569(Dec 10, 2025)

Inventors with similar research interests:

Location History:

San Jose, CA (US) (1996 - 2005)
Fremont, CA (US) (2002 - 2014)
Palo Alto, CA (US) (2011 - 2024)

Company Filing History:

19 out of 641

Kla-Tencor Technologies Corporation

patents

15 out of 1,787

Kla Tencor Corporation

Lumina Instruments Inc.

patents

5. 7 out of 17

Zeta Instruments, Inc.

patents

6. 5 out of 166,264

International Business Machines Corporation

8. 1 out of 834,411

Other

patents

where one patent can have more than one assignee

Years Active: 1996-2024

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Areas of Expertise:

Scanning Micro Profiler

Surface Contour Measurement

Defect Detection

Optical Inspector

Multi-Surface Reflection

Scattered Radiation

Wafer Edge Inspection

Material Independent Profiler

Photoluminescence Measurement

Surface Finish Roughness

Time Domain Multiplexing

Confocal Scatterometer

72 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12147033 - Scanning micro profiler (2024-11-19),

2. 12146830 - Slope, p-component and s-component measurement (2024-11-19),

3. 12146732 - Surface contour measurement (2024-11-19),

4. 12130243 - Angle independent optical surface inspector (2024-10-29),

5. 11988615 - Region prober optical inspector (2024-05-21),

6. 11852592 - Time domain multiplexed defect scanner (2023-12-26),

7. 11733173 - Time domain multiplexed defect scanner (2023-08-22),

8. 11255796 - Region prober optical inspector (2022-02-22),

9. 10769769 - Dual mode inspector (2020-09-08),

10. 10767977 - Scattered radiation defect depth detection (2020-09-08),

11. 10648928 - Scattered radiation optical scanner (2020-05-12),

12. 10641713 - Phase retardance optical scanner (2020-05-05),

13. 10338009 - Method and apparatus to detect defects in transparent solids (2019-07-02),

14. 10094787 - Multi-surface specular reflection inspector (2018-10-09),

15. 9921169 - Method of detecting defect location using multi-surface specular reflection (2018-03-20),

Title: **Innovations and Contributions of Steven W. Meeks**

Introduction

Steven W. Meeks is an accomplished inventor based in Fremont, CA, who has made significant contributions to the field of optical scanning systems. With an impressive portfolio of 72 patents, he has demonstrated an exceptional ability to develop innovative technologies that enhance measurement processes.

Latest Patents

Meeks' latest innovations include two notable patents: the "Slope, p-component and s-component measurement" and "Surface contour measurement." The first patent details an optical scanning system that features a radiating source producing a source light beam and incorporates a de-scan lens. This system is designed to focus light reflected from a sample, allowing for precise measurements in various applications. The second patent also revolves around an advanced optical scanning system that utilizes multiple non-polarizing beam splitters and detectors to ensure accurate surface contour measurements, further emphasizing his expertise in optical engineering.

Career Highlights

Throughout his career, Steven W. Meeks has worked with notable companies such as KLA-Tencor Technologies Corporation and KLA-Tencor Corporation. His experience in these organizations has not only honed his skills but also underscored his commitment to pushing the boundaries of technology in the fields of optics and measurement.

Collaborations

In his professional journey, Meeks has collaborated with talented individuals such as Rusmin Kudinar and Hung Phi Nguyen. These partnerships have contributed to the advancement of innovative technologies and reflect the importance of teamwork in the field of invention.

Conclusion

Steven W. Meeks continues to be a prominent figure in the realm of innovations related to optical scanning systems. His extensive patent portfolio and collaborations with esteemed professionals highlight his dedication to advancing technology and improving measurement techniques. His work stands as a testament to the impact of inventive minds in shaping the future of science and engineering.