For the Inventor, By the Inventor

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San Jose, CA, United States of America

Zeta Instruments, Inc.

USPTO Granted Patents = 17

Forward Citations = 90

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11 inventors (with patents filed for the assignee):

Rusmin Kudinar (12 out of 39 patents)

James Jianguo Xu (10 out of 24 patents)

Ken K Lee (10 out of 36 patents)

4. Hung Phi Nguyen (9 out of 64 patents)

5. Steven W Meeks (7 out of 72 patents)

6. Ronny Soetarman (6 out of 27 patents)

7. Zhen Hou (6 out of 12 patents)

8. Vamsi Mohan Velidandla (3 out of 13 patents)

9. Ben Garland (3 out of 3 patents)

10. Ronny Soetaman (2 out of 2 patents)

11. James Nelson Stainton (1 out of 2 patents)

17 patents: Sort by Forward Citations

1. 10048480 - 3D microscope including insertable components to provide multiple imaging and measurement capabilities (2018-08-14),

2. 9921169 - Method of detecting defect location using multi-surface specular reflection (2018-03-20),

3. 9784691 - Method and apparatus to optically detect defects in transparent solids (2017-10-10),

4. 9664888 - Multi-surface optical 3D microscope (2017-05-30),

5. 9645381 - Multi-surface optical 3D microscope (2017-05-09),

6. 9389408 - 3D microscope and methods of measuring patterned substrates (2016-07-12),

7. 9036869 - Multi-surface optical 3D microscope (2015-05-19),

8. 8976366 - System and method for monitoring LED chip surface roughening process (2015-03-10),

9. 8896825 - Optical inspector (2014-11-25),

10. 8848181 - Multi-surface scattered radiation differentiation (2014-09-30),

11. 8836935 - Optical inspector with selective scattered radiation blocker (2014-09-16),

12. 8830457 - Multi-surface optical inspector (2014-09-09),

13. 8830456 - Optical inspector (2014-09-09),

14. 8184364 - Illuminator for a 3-D optical microscope (2012-05-22),

15. 8174762 - 3-D optical microscope (2012-05-08),

Zeta Instruments, Inc. is a leading provider of advanced 3D optical surface profilers and defect inspection systems. Their products enable highly accurate and precise measurements for a wide range of applications in various industries, including semiconductors, optics, medical devices, and more. With cutting-edge technology and a commitment to innovation, Zeta Instruments aims to deliver superior metrology solutions to help customers optimize their manufacturing processes and enhance product quality.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

17 Patents

#355 in San Jose, CA

#4,370 in California

#18,297 in US

#34,825 in the World

San Jose, CA, United States of America

Zeta Instruments, Inc.

Forward Citations = 90

11 inventors:

Rusmin Kudinar (12 out of 39 patents)

James Jianguo Xu (10 out of 24 patents)

Ken K Lee (10 out of 36 patents)

4. Hung Phi Nguyen (9 out of 64 patents)

5. Steven W Meeks (7 out of 72 patents)

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