The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2015
Filed:
Jun. 12, 2012
James Jianguo Xu, San Jose, CA (US);
Ken Kinsun Lee, Los Altos Hills, CA (US);
Rusmin Kudinar, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Hung Phi Nguyen, Santa Clara, CA (US);
Zhen Hou, Fremont, CA (US);
James Jianguo Xu, San Jose, CA (US);
Ken Kinsun Lee, Los Altos Hills, CA (US);
Rusmin Kudinar, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Hung Phi Nguyen, Santa Clara, CA (US);
Zhen Hou, Fremont, CA (US);
Zeta Instruments, Inc., San Jose, CA (US);
Abstract
A measurement system for monitoring an LED chip surface roughening process is described. A reflective illuminator can run reflectance measurements. A vertical positioning means can adjust a distance between an objective lens and an industrial sample. A horizontal positioning means can move objects in XY plane, and is specifically configured to hold the industrial sample and a reference sample. An optical sensor can acquire images of the industrial sample. A spectrometer can acquire reflectance spectrums of the industrial sample and the reference sample. A processor can control these components. The processor can perform deskew, and calculate an average reflectance and an oscillation amplitude from the reflectance spectrums of the industrial sample.