Company Filing History:
Years Active: 2011-2025
Title: The Innovative Contributions of Stephen Whitten
Introduction
Stephen Whitten is a notable inventor based in Danville, CA (US). He has made significant contributions to the field of substrate processing systems, holding a total of 6 patents. His work focuses on enhancing the efficiency and effectiveness of plasma processing technologies.
Latest Patents
One of Stephen Whitten's latest patents is a substrate processing system that includes a dual ion filter for downstream plasma. This innovative system features a dual ion filter arranged between upper and lower chambers. The upper filter is designed with a first plurality of through holes that filter ions from the plasma in the upper chamber. In contrast, the lower filter includes a second plurality of through holes that control plasma uniformity in the lower chamber. Notably, the diameter of the first plurality of through holes is less than that of the second plurality, and the number of holes in the upper filter exceeds that in the lower filter. This design aims to optimize the performance of substrate processing systems.
Career Highlights
Stephen Whitten is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role involves developing advanced technologies that improve substrate processing methods. His expertise in plasma processing has positioned him as a key contributor to the company's innovative projects.
Collaborations
Throughout his career, Stephen has collaborated with talented individuals such as Armen Avoyan and Yan Fang. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies in the field.
Conclusion
Stephen Whitten's contributions to substrate processing systems exemplify the spirit of innovation in the technology sector. His patents and collaborative efforts continue to influence advancements in plasma processing technologies.