The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Jun. 30, 2008
Jason Augustino, Fremont, CA (US);
Armen Avoyan, Glendale, CA (US);
Yan Fang, Fremont, CA (US);
Duane Outka, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Stephen Whitten, Danville, CA (US);
Jason Augustino, Fremont, CA (US);
Armen Avoyan, Glendale, CA (US);
Yan Fang, Fremont, CA (US);
Duane Outka, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Stephen Whitten, Danville, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
In accordance with one embodiment of the present disclosure, an assembly is provided comprising a multi-component electrode and a peripherally engaging electrode carrier. The peripherally engaging electrode carrier comprises a carrier frame and a plurality of reciprocating electrode supports. The multi-component electrode is positioned in the electrode accommodating aperture of the carrier frame. The backing plate of the electrode comprises a plurality of mounting recesses formed about its periphery. The reciprocating electrode supports can be reciprocated into and out of the mounting recesses. Additional embodiments of broader and narrower scope are contemplated.